Universidade de Santiago de Compostela

High Quality Thin-films (down to 4nm) by Water-based Chemical Solution

Posted by Universidade de Santiago de CompostelaResponsive · Innovative Products and Technologies · Spain

Summary of the technology

Cheaper alternative, versatile, with the quality required for fundamental studies and applications.
- Very high quality of epitaxial (bi)layers, down to 4 nm, comparable to PLD.
- Outstanding homogeneity (over 1" substrate) and very affordable alternative to high-vacuum tech.

Some examples:
- Yttrium Iron Garnet (YIG) over GGG; ZnO over sapphire.
- Ferroelectric BiFeO3 on LSMO. Manganites, cobaltites and their combinations
- Combined with MBE, e.g. Multilevel device integrated on silicon: Small, 2017, 1701614, cover (http://doi.org/10.1002/smll.201770208).

Universidade de Santiago de Compostela
Universidade de Santiago de Compostela

Description of the technology

CHALLENGE: Optimization of device performances while keeping an affordable production cost.

We propose a cheaper alternative, or complementary to physical methods as MBE, PLD, sputtering...  See our Review: J. Mater. Chem. C, 2018, 6, 3834-3844.

> High quality epitaxial thin-films/bilayers, down to 4 nm thick. Outstanding homogeneity in large areas (PoC 1" substrate), comparable to PLD. Complex epitaxial nanostructured oxides with new functionalities.

> Reduce processing costs.



> Stabilization of heavy cations like Iridium. Synthesis of nitrides: CrN, TiN, oxonitrides.

> Incorporating nanoparticles to modulate thermal conduction in the films.

> Adapt this method to deposition in flexible substrates.

Additional information (attached documents)

Related keywords

  • Nanotechnologies related to electronics & microelectronics
  • Coatings
  • Nanomaterials
  • Chemistry
  • Industrial manufacturing, Material and Transport Technologies
  • Deposition
  • thin-films

About Universidade de Santiago de Compostela

Technology Transfer Office from Spain

The CiQUS (University of Santiago de Compostela, Spain), addresses challenges in Biological and Medicinal Chemistry, New functional Materials and Synthetic Technologies for Sustainable Development.

CiQUS hosts 20 research groups, including 5 ERC projects.
> 90-100 papers/yr, average Impact Factor IF=7,10 JCR. 82%Q1, 45%D1 (2016-2017).
> 2014-2017: 4,70 M €/yr from competitive R&D funds (27% international, 18% private), 16 patents, 2 licenses, 3 spin-offs.

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