Yissum - Research Development Company of the Hebrew University

Low-Cost Transfer Process for Doping Nanostructures and Surfaces on Silicon

Posted by Yissum - Research Development Company of the Hebrew UniversityResponsive · Innovative Products and Technologies · Israel

Summary of the technology

Transfer process for doping semiconductors
Keywords: dopants, semiconductors, process, low-cost
Project ID : 9-2011-2608

Yissum - Research Development Company of the Hebrew University

Description of the technology

Application to Low cost – High performance Photo-Voltaic Cells


Semiconductor material and devices, Photovoltaic cells

Development Stage

Technology available for incorporation into existing schedulers


Solar Energy Systems


  • The invention addresses a critical stage in the processing of semiconductor devices, offering simple, low cost alternative.
  • The conventional process of creating dopant layers using ion implanters, diffusion and anneal steps is replaced by single high throughput yet low cost process.
  • The new method yields ultra shallow dopant layer with sharp edges profile, substantially improving the efficiency of collecting solar radiation and of its conversion to electrical power.
  • Our Innovation
  • The new doping process is based on creating a dopant-containing monolayer on an external surface (“Donor Surface”) as source for the dopant atoms, bringing the donor surface to close proximity with the semiconductor devices, and transferring the dopants from the donor layer onto the target semiconductor surface using brief Rapid Thermal Processing step.

Key Features

  • A simple, single step, low cost process replaces the use of costly, demanding processes for forming dopant layer in semiconductor devices.
  • Very shallow doping layer (~5-50 nm) and steep layer boundary (~40nm), with excellent control of both doping layer width and profile.
  • Can be used on thin Si substrates (≤100μm), thus reducing the cost of Si raw material and shifting cells design closer to optimal efficiency thickness.
  • Doping stage does not require clean room environment nor high purity doping source material
  • Development Milestones
  • Process developed in laboratory level
  • Demonstrated Si photovoltaic devices with excellent performances.
  • Seeking opportunity to license the technology / funding for development and commercialization

The Opportunity

Si technology is the most mature alternative for large scale PV commercialization and implementation, held back mostly by high $/Watt-peak.

The invented technology may substantially reduce $/W-p by its simple yet efficient alternative to costly stages in conventional Si based PV production

Project manager

Matt Zarek

Project researchers

Roie Yerushalmi
HUJI, Faculty of Science
The Institute of Chemistry

Related keywords

  • Electronics, Microelectronics
  • Nanotechnologies related to electronics & microelectronics
  • Micro and Nanotechnology related to Electronics and Microelectronics
  • Chemistry
  • Materials Technology
  • Some other electronics related
  • Chemicals and Materials
  • Chemistry & Materials

About Yissum - Research Development Company of the Hebrew University

Technology Transfer Office from Israel

Yissum Research Development Company of the Hebrew University of Jerusalem Ltd. Founded in 1964 to protect and commercialize the Hebrew University’s intellectual property. Ranked among the top technology transfer companies, Yissum has registered over 8,900 patents covering 2,500 inventions; has licensed out 800 technologies and has spun-off 90 companies. Products that are based on Hebrew University technologies and were commercialized by Yissum generate today over $2 Billion in annual sales.

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