The largest open innovation marketplace : 1,000 active tech requests and offers, 109,413 registered users

  • Tech offer O-1075
  • Posted on: 16/04/2013
  • Deadline : 16/05/2014
  • Active users : 2181
  • Intellectual property status

    U.S. Patent/Publication Number Title
    5,158,656Method and Apparatus for the Electrolytic Preparation of Group IV and V Hydrides
    6,080,297Method and Apparatus for Constant Composition Delivery of Hydride Gases for Semiconductor Processing
    20060231159A1Dual-Flow Valve and Internal Processing Vessel Isolation System
    7,172,646Reactive Liquid Based Gas Storage and Delivery Systems
    7,303,607Liquid Media Containing Lewis Acidic Reactive Compounds for Storage and Delivery of Lewis Basic Gases
    7,282,084Liquid Media Containing Lewis Basic Reactive Compounds for Storage and Delivery of Lewis Acidic Gases
    20060008392A1Storage and Delivery Systems for Gases Held in Liquid Medium
    20060060818A1Ionic Liquid Based Mixtures for Gas Storage and Delivery
    20060060817A1Ionic Liquid Based Mixtures for Gas Storage and Delivery
    20070240997Method and Apparatus for Achieving Maximum Yield in the Electrolytic Preparation of Group IV and V Hydrides
    20070279139Contact Methods for Formation of Lewis Gas/Liquid Systems and Recovery of Lewis Gas Therefrom
    20070217967Wick Systems for Complexed Gas Technology

  • Current development status

    Commercially available technologies

  • Desired business relationship

    Technology selling, Patent licensing

Description of the technology offer

In the semiconductor fabrication process, ion implant is a step utilizing hazardous gases such as arsine, phosphine and others to dope semiconductors such as silicon. Since the source gases for the ions desired are hazardous themselves, systems incorporating safety in handling and use of the source gases are highly valued. Customers typically do not purchase or desire high pressure cylinders of the gases utilized in this market, but would rather have a system which either produces the desired species on demand, or incorporates technology which greatly reduces the risk of a catastrophic release.

New and innovative aspects

Examples of sub-atmospheric gas delivery technology suitable to deliver such species might be adsorption of the ion implantation gas onto solid or use of a solid precursor source for the source...
Read more
Get in touch with the tech’s owner

Related technology offers :

Delivery systems

What is this?

This is a Technology Offer. A Technology Offer is the way Innoget clients promotes an innovative product, technology, method, process or service to get business and technology partners to contact them. Professionals like you can contact them if the product or technology is of your interest

What is innoget.com?

An open innovation marketplace. A global community comprised of thousands of professionals who have free access to technology requests and offers posted by Innoget clients, companies and research centers. Our clients are international organizations convinced of the need to collaborate with external partners and actively seek to invest in joint development, technology acquisition, licensing or any other type of collaboration (open innovation)

Via www.innoget.com our clients connect with companies, research institutions and innovation professionals worldwide. Organizations seeking innovation meet innovation-generating organizations. They capture external knowledge via publication of technology requests and promote the knowledge generated within their organizations via publication of technology offers. By knowledge we understand innovative technologies, products, methods, procedures and services. The transfer of information is done confidentially between applicant and supplier through the website. It is based on the information exchanged here that they decide to mantain contact offline

innoget is an open innovation supplier. innoget offers a full range of services related to the acquisition, revaluation and marketing of technologies and addressing the needs of R&D and innovation. The www.innoget.com website is the tool through which our clients connect with companies, research institutions and innovation professionals worldwide. In innoget.com organizations seeking innovation meet innovation-generating organizations. Our customers capture external knowledge (via publication of technology requests) and promote the knowledge generated within their organizations (via technology offers). By knowledge we understand innovative technologies, products, methods, procedures and services. Our clients are multinational companies, small and medium size companies, research centers, technology transfer offices, science and technology parks as well as professionals of the innovation world from all sectors and disciplines. innoget, your open innovation intermediary
© 2014 innoget